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Process Specialties introduces the
only complete of NIST traceable metal standards in the industry.
Designed for the calibration and monitoring of the most advanced and
widely used metal metrology tools.
PSI has developed two different NIST
traceable metal thickness standards for tool calibration on a single
substrate.
This allows the user to establish the linearity of tools in specific
thickness ranges -without the need to load or set-up an additional
standard.
Process Specialties
is the first to offer a line of NIST traceable metal calibration
standards. These new standards feature the most widely used metals
in today's advanced metallization steps, including Copper, Tantalum,
Titanium, Tungsten and Aluminum.
Advanced and unique diagnostic
features allow the user to determine the tool's useable spot size,
verify actual beam position vs. the Electronic spot and monitor
stage height and repeatability. On-wafer pattern recognition
features allow for auto loading of the standard.
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