Welcome to PSI Standards

PSI Standards is a product line of NIST traceable calibration standards from the PSI Standards Laboratory. For three decades PSI Standards has manufactured OEM Thin Film Calibration Standards for nearly all the major U.S. metrology tool companies. Chances are if you are calibrating your metrology tool using a check sample standard from the tool manufacturer, you may already be using one of our products.

The Highest Quality Standards in the Semiconductor Industry...

In the year 2001 The PSI Standards Laboratory recognized a real need by end-users in the industry for a new reliable, high quality and "independent supplier" of Thin Film and other Calibration Standards. So over a period of years we listened to the customers to see what they really wanted and needed in a calibration standard. Then we developed and built the highest quality, most user friendly Thin Film Calibration Standards available in the Semiconductor Industry today. The calibration and monitoring of all Metrology tools using a PSI Standard is one of the most cost effective ways to maximize your process control and yields while maintaining ISO compliance.

In the year 2005 the PSI Standards laboratory was first awarded ISO/IEC 17025 accreditation by NVLAP, and after 15 years of providing NIST traceable calibration standards, on March 31, 2020 the PSI Standards Laboratory has decided to cease operations.

Earlier in 2020 PSI Standards made arrangements with another highly respected ISO/IEC 17025 calibration laboratory to continue recertification services of all PSI Standards out in the field. Please contact PSI Standards in Northern California for the contact information of the new calibration laboratory. They will be able to offer recertification services and in addition offer new NIST traceable standards products as well.


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